Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1999 Vol. 17; Iss. 6
Formation of low resistance Pt ohmic contacts to p-type GaN using two-step surface treatment
Jang, Ja-Soon, Park, Seong-Ju, Seong, Tae-YeonVolume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.591045
File:
PDF, 420 KB
english, 1999