Formation of low resistance Pt ohmic contacts to p-type GaN...

Formation of low resistance Pt ohmic contacts to p-type GaN using two-step surface treatment

Jang, Ja-Soon, Park, Seong-Ju, Seong, Tae-Yeon
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Volume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.591045
File:
PDF, 420 KB
english, 1999
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