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Efficiency of methane and acetylene in forming diamond by microwave plasma assisted chemical vapor deposition
Johnson, Curtis E., Weimer, Wayne A., Cerio, Frank M.Volume:
7
Language:
english
Journal:
Journal of Materials Research
DOI:
10.1557/JMR.1992.1427
Date:
June, 1992
File:
PDF, 479 KB
english, 1992