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The electrical property of plasma-treated Ta/TaNx diffusion barrier
Yu-Sheng Wang, Wen-Hsi Lee, Ying-Lang Wang, Chi-Cheng Hung, Shih-Chieh ChangVolume:
69
Year:
2008
Language:
english
Pages:
4
DOI:
10.1016/j.jpcs.2007.07.048
File:
PDF, 341 KB
english, 2008