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Organofluorosilicate glass: A dense low-k dielectric with superior materials properties
Y.L. Cheng, Y.L. Wang, Yungder Juang, M.L. O’Neill, A.S. Lukas, E.J. Karwacki, S.A. McGuian, Allen Tang, C.L. WuVolume:
69
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.jpcs.2007.11.019
File:
PDF, 1.05 MB
english, 2008