Characterization of BCN films synthesized by radiofrequency...

Journal of Physics and Chemistry of Solids 2009 Vol. 70; Iss. 1

Characterization of BCN films synthesized by radiofrequency plasma enhanced chemical vapor deposition

Md. Abdul Mannan, Masamitsu Nagano, Tetsuya Kida, Norie Hirao, Yuji Baba
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Volume:
70
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.jpcs.2008.08.013
File:
PDF, 560 KB
english, 2009
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