Microstructure and Thermal Stability of Aluminum Nitride...

Journal of The Electrochemical Society 2002 Vol. 149; Iss. 2

Microstructure and Thermal Stability of Aluminum Nitride Thin Films Deposited at Low Temperature on Silicon

Harris, K. K., Gila, B. P., Deroaches, J., Lee, K. N., MacKenzie, J. D., Abernathy, C. R., Ren, F., Pearton, S. J.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
149
Year:
2002
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1431966
File:
PDF, 269 KB
english, 2002
Conversion to is in progress
Conversion to is failed