Nanoscratch studies of SiGe epitaxial layer damage on the...

Journal of Physics and Chemistry of Solids 2011 Vol. 72; Iss. 6

Nanoscratch studies of SiGe epitaxial layer damage on the Si substrate

Tien-Yu Lin, Hua-Chiang Wen, Zue-Chin Chang, Wen-Kuang Hsu, Chang-Pin Chou, Chien-Huang Tsai, Derming Lian
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
72
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.jpcs.2011.03.015
File:
PDF, 1.18 MB
english, 2011
Conversion to is in progress
Conversion to is failed