[IEEE 2014 6th International Congress on Ultra Modern Telecommunications and Control Systems and Workshops (ICUMT) - St. Petersburg, Russia (2014.10.6-2014.10.8)] 2014 6th International Congress on Ultra Modern Telecommunications and Control Systems and Workshops (ICUMT) - Robust control of rapid thermal processes applied to vapor deposition processing
Aranovskiy, Stanislav, Kapitonov, Aleksandr, Bobtsov, Alexey, Pyrkin, Anton, Zavarin, Evgeny, Davydov, Denis, Ortega, RomeoYear:
2014
Language:
english
DOI:
10.1109/icumt.2014.7002165
File:
PDF, 355 KB
english, 2014