Structural Study of BF$_{2}$ Ion Implantation and Post...

Japanese Journal of Applied Physics 2011 / 12 Vol. 50

Structural Study of BF$_{2}$ Ion Implantation and Post Annealing of BaSi$_{2}$ Epitaxial Films

Hara, Kosuke O., Usami, Noritaka, Hoshi, Yusuke, Shiraki, Yasuhiro, Suzuno, Mitsushi, Toko, Kaoru, Suemasu, Takashi
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Volume:
50
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.50.121202
Date:
December, 2011
File:
PDF, 603 KB
english, 2011
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