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Buried selectively etchable microstructures in GaAs using deep nitrogen implantation
Miao, Jianmin, Würfl, Joachim, Rück, Dorothee, Hartnagel, HansVolume:
126
Language:
english
Journal:
Radiation Effects and Defects in Solids
DOI:
10.1080/10420159308219743
Date:
March, 1993
File:
PDF, 433 KB
english, 1993