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Effect of Si and C concentration on the microstructure, and the mechanical, tribological and electrochemical properties of nanocomposite TiC/a-SiC:H/a-C:H coatings prepared by plasma enhanced chemical vapor deposition
Li, Duanjie, Hassani, Salim, Poulin, Suzie, Szpunar, Jerzy A., Martinu, Ludvik, Klemberg-Sapieha, Jolanta E.Volume:
111
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3684602
File:
PDF, 2.34 MB
english, 2012