Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2001 Vol. 19; Iss. 5
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Fabrication of nanohole array on Si using self-organized porous alumina mask
Shingubara, Shoso, Okino, Osamu, Murakami, Yasuhiko, Sakaue, Hiroyuki, Takahagi, TakayukiVolume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1403442
File:
PDF, 682 KB
english, 2001