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Fast Si (100) etching with a smooth surface near the boiling temperature in surfactant-modified tetramethylammonium hydroxide solutions
Zhang, De, Tang, Bin, Cheng, Yongsheng, Sato, KazuoVolume:
9
Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2014.0214
Date:
September, 2014
File:
PDF, 337 KB
english, 2014