![](/img/cover-not-exists.png)
[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Al2O3/ZrO2/Al2O3 High-k Dielectric Stacks on Germanium Substrates Grown by Atomic Layer Deposition at High and Low Temperatures
Bethge, Ole, Abermann, Stephan, Henkel, Christoph, Bertagnolli, EmmerichVolume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2981618
File:
PDF, 424 KB
english, 2008