![](/img/cover-not-exists.png)
Ion implantation for isolation of AlGaN/GaN HEMTs using C or Al
Taube, Andrzej, Kamińska, Eliana, Kozubal, Maciej, Kaczmarski, Jakub, Wojtasiak, Wojciech, Jasiński, Jakub, Borysiewicz, Michał A., Ekielski, Marek, Juchniewicz, Marcin, Grochowski, Jakub, Myśliwiec,Volume:
212
Language:
english
Journal:
physica status solidi (a)
DOI:
10.1002/pssa.201431724
Date:
May, 2015
File:
PDF, 2.17 MB
english, 2015