Fabrication of SU-8 moulds on glass substrates by using a common thin negative photoresist as an adhesive layer
Liu, Junshan, Song, Dongfang, Zong, Guoge, Yin, Penghe, Zhang, Xiaolei, Xu, Zheng, Du, Liqun, Liu, Chong, Wang, LidingVolume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/3/035009
Date:
March, 2014
File:
PDF, 992 KB
english, 2014