Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2009 Vol. 27; Iss. 3
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Investigation on feedback control of linear motors in ultraprecision-machine feed-drive systems
Guan, Chao-Liang, Dai, Yi-Fan, Xie, Xu-Hui, Yin, Zi-QiangVolume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3137966
File:
PDF, 879 KB
english, 2009