Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2006 Vol. 24; Iss. 5
Multiparameter characterization of cluster ion beams
Nicolaescu, D., Takaoka, G. H., Ishikawa, J.Volume:
24
Year:
2006
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.2335433
File:
PDF, 1.28 MB
english, 2006