Design optimization & fabrication of micro cantilever...

Sensors and Actuators A: Physical 2015 / 04 Vol. 225

Design optimization & fabrication of micro cantilever for switching application

Khushalani, Deepak G., Dubey, Vaibhav R., Bheley, Pratik P., Kalambe, Jayu P., Pande, Rajesh S., Patrikar, Rajendra M.
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Volume:
225
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2014.10.038
Date:
April, 2015
File:
PDF, 797 KB
english, 2015
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