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Surface micromachined mechanisms and micromotors
Mehregany, M, Tai, Yu-ChongVolume:
1
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/1/2/001
Date:
June, 1991
File:
PDF, 1.53 MB
english, 1991