A 35-${\mu} \hbox{m}$ Pitch IR Thermo-Mechanical MEMS...

IEEE Journal of Selected Topics in Quantum Electronics 2015 / 7 Vol. 21; Iss. 4

A 35-${\mu} \hbox{m}$ Pitch IR Thermo-Mechanical MEMS Sensor With AC-Coupled Optical Readout

Adiyan, Ulas, Civitci, Fehmi, Ferhanoglu, Onur, Torun, Hamdi, Urey, Hakan
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Volume:
21
Language:
english
Journal:
IEEE Journal of Selected Topics in Quantum Electronics
DOI:
10.1109/jstqe.2014.2384503
Date:
July, 2015
File:
PDF, 3.37 MB
english, 2015
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