Open questions in surface topography measurement: a roadmap

Surface Topography: Metrology and Properties 2015 / 01 Vol. 3; Iss. 1

Open questions in surface topography measurement: a roadmap

Leach, Richard, Evans, Christopher, He, Liangyu, Davies, Angela, Duparré, Angela, Henning, Andrew, Jones, Christopher W, O’Connor, Daniel
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Volume:
3
Language:
english
Journal:
Surface Topography: Metrology and Properties
DOI:
10.1088/2051-672X/3/1/013001
Date:
January, 2015
File:
PDF, 2.44 MB
english, 2015
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