Challenges in Surface Science for a P-in-Si Quantum...

Surface Review and Letters 2003 / 04 Vol. 10; Iss. 2n3

Challenges in Surface Science for a P-in-Si Quantum Computer — Phosphine Adsorption/Incorporation and Epitaxial Si Encapsulation

Oberbeck, Lars, Curson, Neil J., Schofield, Steven R., Hallam, Toby, Simmons, Michelle Y., Clark, Robert G.
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Volume:
10
Language:
english
Journal:
Surface Review and Letters
DOI:
10.1142/S0218625X03005098
Date:
April, 2003
File:
PDF, 1.85 MB
english, 2003
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