Nucleation Control of Carbon Nanowalls Using Inductively Coupled Plasma-Enhanced Chemical Vapor Deposition
Hiramatsu, Mineo, Nihashi, Yuki, Kondo, Hiroki, Hori, MasaruVolume:
52
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.52.01AK05
Date:
January, 2013
File:
PDF, 1.16 MB
english, 2013