In-process measuring of the electrical shunt resistance of laser-scribed thin-film stacks by nested circular scribes
Wang, X., Ehrhardt, M., Lorenz, P., Scheit, C., Ragnow, S., Ni, X. W., Zimmer, K.Volume:
84
Year:
2013
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4824119
File:
PDF, 1.46 MB
english, 2013