Effect of Al Distribution on Carrier Generation of Atomic...

Journal of The Electrochemical Society 2011 Vol. 158; Iss. 5

Effect of Al Distribution on Carrier Generation of Atomic Layer Deposited Al-Doped ZnO Films

Lee, Do-Joong, Kwon, Jang-Yeon, Kim, Soo-Hyun, Kim, Hyun-Mi, Kim, Ki-Bum
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Volume:
158
Year:
2011
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3568881
File:
PDF, 1.89 MB
english, 2011
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