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A General Design Strategy for Block Copolymer Directed Self-Assembly Patterning of Integrated Circuits Contact Holes using an Alphabet Approach
Yi, He, Bao, Xin-Yu, Tiberio, Richard, Wong, H.-S. PhilipVolume:
15
Language:
english
Journal:
Nano Letters
DOI:
10.1021/nl502172m
Date:
February, 2015
File:
PDF, 3.12 MB
english, 2015