Gallium Nitride Nanorods Fabricated by Inductively Coupled...

Japanese Journal of Applied Physics 2002 / 8 Vol. 41; Iss. Part 2, No

Gallium Nitride Nanorods Fabricated by Inductively Coupled Plasma Reactive Ion Etching

Yu, Chang-Chin, Chu, Chen-Fu, Tsai, Juen-Yen, Huang, Hung Wen, Hsueh, Tao-Hung, Lin, Chia-Feng, Wang, Shing-Chung
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Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.L910
Date:
August, 2002
File:
PDF, 86 KB
english, 2002
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