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UV-Assisted Modification and Removal Mechanism of a Fluorocarbon Polymer Film on Low- k Dielectric Trench Structure
Mukherjee, Tamal, Berhe, Seare A., Goswami, Arindom, Chyan, Oliver, Singh, Kanwal Jit, Brown, IanVolume:
7
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/am508734b
Date:
March, 2015
File:
PDF, 1.54 MB
english, 2015