Directed Self-Assembly of Silicon-Containing Block Copolymer Thin Films
Maher, Michael J., Rettner, Charles T., Bates, Christopher M., Blachut, Gregory, Carlson, Matthew C., Durand, William J., Ellison, Christopher J., Sanders, Daniel P., Cheng, Joy Y., Willson, C. GrantVolume:
7
Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/am508197k
Date:
February, 2015
File:
PDF, 6.98 MB
english, 2015