ECS Transactions [ECS 26th Symposium on Microelectronics Technology and Devices (SBMicro 2011) - Joao Pessoa, Brazil (August 30 - September 2, 2011)] - Sputtered Silicon Nitride Thin Films for Non-Volatile Memory Applications
Adam, Matheus, Coelho, Artur Vicente P., Pereira, Marcelo B., Boudinov, Henri I.Year:
2011
Language:
english
DOI:
10.1149/1.3615215
File:
PDF, 801 KB
english, 2011