Spatial Atmospheric Atomic Layer Deposition of In...

ACS Applied Materials & Interfaces 2015 / 02

Spatial Atmospheric Atomic Layer Deposition of In x Ga y Zn z O for Thin Film Transistors

Illiberi, A., Cobb, B., Sharma, A., Grehl, T., Brongersma, H., Roozeboom, F., Gelinck, G., Poodt, P.
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Language:
english
Journal:
ACS Applied Materials & Interfaces
DOI:
10.1021/am508071y
Date:
February, 2015
File:
PDF, 1.38 MB
english, 2015
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