A Landau–Peierls Analysis of Contact Hole Placement in Directed Self-Assembly of Linear Arrays of Block Copolymer Cylinders
Laachi, Nabil, Shykind, David, Fredrickson, Glenn H.Volume:
47
Language:
english
Journal:
Macromolecules
DOI:
10.1021/ma501679a
Date:
December, 2014
File:
PDF, 1.11 MB
english, 2014