Controlling Stress in Large-Grained Solid Phase Crystallized n-Type Poly-Si Thin Films To Improve Crystal Quality
Kumar, Avishek, Widenborg, Per I., Dalapati, Goutam K., Ke, Cangming, Subramanian, Gomathy Sandhya, Aberle, ArminVolume:
15
Language:
english
Journal:
Crystal Growth & Design
DOI:
10.1021/cg5011659
Date:
March, 2015
File:
PDF, 3.59 MB
english, 2015