Design of Volatile Mixed-Ligand Tantalum(V) Compounds as...

Crystal Growth & Design 2015 / 03 Vol. 15; Iss. 3

Design of Volatile Mixed-Ligand Tantalum(V) Compounds as Precursors to Ta 2 O 5 Films

Appel, Linus, Fiz, Raquel, Tyrra, Wieland, Pantenburg, Ingo, Mathur, Sanjay
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Volume:
15
Language:
english
Journal:
Crystal Growth & Design
DOI:
10.1021/cg501438k
Date:
March, 2015
File:
PDF, 1.52 MB
english, 2015
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