Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2012 Vol. 30; Iss. 1
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Recent developments and design challenges in continuous roller micro- and nanoimprinting
Dumond, Jarrett J., Yee Low, HongVolume:
30
Year:
2012
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3661355
File:
PDF, 7.91 MB
english, 2012