![](/img/cover-not-exists.png)
Electrical Properties of HfO 2 Thin Insulating Film Prepared by Anodic Oxidation
Yanagisawa, Hideto, Kamijyo, Masahiro, Shinkai, Satoko, Sasaki, Katsutaka, Abe, Yoshio, Yamane, MisaoVolume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.5284
Date:
August, 2002
File:
PDF, 133 KB
english, 2002