Electrical Properties of HfO 2...

Electrical Properties of HfO 2 Thin Insulating Film Prepared by Anodic Oxidation

Yanagisawa, Hideto, Kamijyo, Masahiro, Shinkai, Satoko, Sasaki, Katsutaka, Abe, Yoshio, Yamane, Misao
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Volume:
41
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.41.5284
Date:
August, 2002
File:
PDF, 133 KB
english, 2002
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