Properties of Methyl Boron Nitride Film for Next Generation...

Japanese Journal of Applied Physics 2008 / 4 Vol. 47; Iss. 4

Properties of Methyl Boron Nitride Film for Next Generation Low- k Interconnection

Tokuyama, Shinji, Hara, Makoto, Mazumder, Motaharu Kabir, Watanabe, Daisuke, Kimura, Chiharu, Aoki, Hidemitsu, Sugino, Takashi
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Volume:
47
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.47.2492
Date:
April, 2008
File:
PDF, 210 KB
english, 2008
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