PITCH MEASUREMENT BY TRACEABLE ATOMIC FORCE MICROSCOPE
CHEN, CHAO-JUNG, CHEN, YEN-LIANG, CHANG, LIANG-CHIHVolume:
2
Language:
english
Journal:
International Journal of Nanoscience
DOI:
10.1142/S0219581X0300136X
Date:
August, 2003
File:
PDF, 1.31 MB
english, 2003