[IEEE 2010 IEEE International Conference on Automation, Quality and Testing, Robotics (AQTR 2010) - Cluj-Napoca, Romania (2010.05.28-2010.05.30)] 2010 IEEE International Conference on Automation, Quality and Testing, Robotics (AQTR) - Manufacturing and testing technology for a silicon piezoresistive microaccelerometer
Comeaga, C. D., Bogatu, L., Ionascu, G., Alexandrescu, N., Sandu, A., Manea, E.Year:
2010
Language:
english
DOI:
10.1109/aqtr.2010.5520818
File:
PDF, 3.38 MB
english, 2010