Frequency Domain Based Measurement Method for the Thermal...

Procedia Engineering 2014 Vol. 87

Frequency Domain Based Measurement Method for the Thermal Parameters of a Thin-film Diaphragm Embedded in a MEMS Multi-parameter Wind Sensor

Beigelbeck, R., Reyes-Romero, D., Cerimovic, S., Kohl, F., Voglhuber-Brunnmaier, T., Jakoby, B., Urban, G.A.
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Volume:
87
Year:
2014
Language:
english
Journal:
Procedia Engineering
DOI:
10.1016/j.proeng.2014.11.568
File:
PDF, 609 KB
english, 2014
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