Characterization of high-k dielectrics using MeV elastic...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2015 / 03 Vol. 347

Characterization of high-k dielectrics using MeV elastic scattering of He ions

Zoller, C.J., Dentoni Litta, E., Primetzhofer, D.
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Volume:
347
Language:
english
Journal:
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
DOI:
10.1016/j.nimb.2014.12.080
Date:
March, 2015
File:
PDF, 535 KB
english, 2015
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