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Suppression of Crack Generation in GaN/AlGaN Distributed Bragg Reflector on Sapphire by the Insertion of GaN/AlGaN Superlattice Grown by Metal-Organic Chemical Vapor Deposition
Nakada, Naoyuki, Ishikawa, Hiroyasu, Egawa, Takashi, Jimbo, TakashiVolume:
42
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.42.L144
Date:
February, 2003
File:
PDF, 225 KB
english, 2003