Highly sensitive amorphous In–Ga–Zn–O films for ppb-level...

Highly sensitive amorphous In–Ga–Zn–O films for ppb-level ozone sensing: Effects of deposition temperature

Wu, Chiu-Hsien, Jiang, Guo-Jhen, Chang, Kai-Wei, Lin, Chin-Wei, Chen, Kue-Lin
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Volume:
211
Language:
english
Journal:
Sensors and Actuators B: Chemical
DOI:
10.1016/j.snb.2015.01.048
Date:
May, 2015
File:
PDF, 2.03 MB
english, 2015
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