Growth of (Sr,La)-(Ta,Ti)-O-N perovskite oxide and oxynitride films by radio frequency magnetron sputtering: Influence of the reactive atmosphere on the film structure
Le Paven, C., Le Gendre, L., Benzerga, R., Cheviré, F., Tessier, F., Jacq, S., Traoré-Mantion, S., Sharaiha, A.Volume:
413
Language:
english
Journal:
Journal of Crystal Growth
DOI:
10.1016/j.jcrysgro.2014.12.001
Date:
March, 2015
File:
PDF, 1.07 MB
english, 2015