A G&P EWMA algorithm for high-mix semiconductor...

Journal of Process Control 2011 Vol. 21; Iss. 1

A G&P EWMA algorithm for high-mix semiconductor manufacturing processes

Chun-Cheng Chang, Tian-Hong Pan, David Shan-Hill Wong, Shi-Shang Jang
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Volume:
21
Year:
2011
Language:
english
Pages:
8
DOI:
10.1016/j.jprocont.2010.09.005
File:
PDF, 1.01 MB
english, 2011
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