Modeling and control of a novel X–Y parallel...

ISA Transactions 2015 / 05 Vol. 56

Modeling and control of a novel X–Y parallel piezoelectric-actuator driven nanopositioner

Liu, Pengbo, Yan, Peng, Zhang, Zhen, Leng, Tongtong
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Volume:
56
Language:
english
Journal:
ISA Transactions
DOI:
10.1016/j.isatra.2014.10.005
Date:
May, 2015
File:
PDF, 2.74 MB
english, 2015
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