SPIE Proceedings [SPIE Microelectronics, MEMS, and...

  • Main
  • SPIE Proceedings [SPIE...

SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Perth, Australia (Tuesday 9 December 2003)] Device and Process Technologies for MEMS, Microelectronics, and Photonics III - A novel bistable thermally actuated snap-through actuator for out-of-plane deflection

Yu, Kevin, Michael, Aron, Kwok, Chee Y., Chiao, Jung-Chih, Hariz, Alex J., Jamieson, David N., Parish, Giacinta, Varadan, Vijay K.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
5276
Year:
2004
Language:
english
DOI:
10.1117/12.523272
File:
PDF, 175 KB
english, 2004
Conversion to is in progress
Conversion to is failed