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SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Perth, Australia (Tuesday 9 December 2003)] Device and Process Technologies for MEMS, Microelectronics, and Photonics III - A novel bistable thermally actuated snap-through actuator for out-of-plane deflection
Yu, Kevin, Michael, Aron, Kwok, Chee Y., Chiao, Jung-Chih, Hariz, Alex J., Jamieson, David N., Parish, Giacinta, Varadan, Vijay K.Volume:
5276
Year:
2004
Language:
english
DOI:
10.1117/12.523272
File:
PDF, 175 KB
english, 2004