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Nanomechanical property screening of combinatorial thin-film libraries by nanoindentation
Warren, Oden L, Wyrobek, Thomas JVolume:
16
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/16/1/014
Date:
January, 2005
File:
PDF, 745 KB
english, 2005