Structure of MoCN films deposited by cathodic arc...

Thin Solid Films 2015 / 02 Vol. 577

Structure of MoCN films deposited by cathodic arc evaporation

Gilewicz, A., Jedrzejewski, R., Kochmanska, A.E., Warcholinski, B.
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Volume:
577
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.01.031
Date:
February, 2015
File:
PDF, 769 KB
english, 2015
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